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MEMSnet Home: MEMS-Talk: RE:Etching vertical walls MEMS-talk Digest, Vol 5, Issue 29
RE:Etching vertical walls MEMS-talk Digest, Vol 5, Issue 29
2003-03-27
Miriam Hershcovitz
RE:Etching vertical walls MEMS-talk Digest, Vol 5, Issue 29
Miriam Hershcovitz
2003-03-27
Hi Ramji Dhakal
you can create vertical walls using Si (110) wafers etched in KOH solution.
use 44 gr per 100 ml. DI water at 80 C , use Si Nitride as a mask.
good luck,
Miriam Hershcovitz - TeraOp

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