Yanni,
It depends how thick your parylene film is. If the thickness is around 1 um or
below, you should be able to pattern it just by using RIE O2 plasma etching. You
can use normal photoresist (like Shipley 1818 I used) as mask. After patterning
the photoresist, hard bake it at 120C for more than 1h (maybe 2h).
I don't know if there is any etchant solution which can etch parylene
chemically.
Zhiliang
 hui li  wrote: Hi,

My Name is Yanni, I am looking for a method to pattern parylen. Could anyone
suggest me some literatures to read or just tell me what photoresis/etchant
combination i can use?

Thanks very much,

Yanni


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