Yanni,
      You may want to side step the issue of patterning Parylene.  It is very
difficult.  I would think photosensitive Polymide or B.C.B.   contact Dupont,
Arch, Dow  for help.  Bill Moffat

-----Original Message-----
From: hui li [mailto:[email protected]]
Sent: Wednesday, March 26, 2003 5:34 PM
To: [email protected]
Subject: [mems-talk] parylene patterning


Hi,

My Name is Yanni, I am looking for a method to pattern parylen. Could anyone
suggest me some literatures to read or just tell me what photoresis/etchant
combination i can use?

Thanks very much,

Yanni


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