We at Trion Technology in Arizona have developed a low temp Nitride process
using our ICP design coupled with a new gas distribution system for the
deposition of Nitride. Unfortunately the temperatures we are working with are
around 150 degrees C. We would be interested in working with you at the lower
temperatures so if you contact me directly at 480-968-8818 x 11 we might be able
to process some samples for you. Thanks

Bob Henderson-GM
Trion Technology
1025 S. 52nd Street
Tempe, Arizona 85281
Phone: 480-968-8818
Fax: 480-968-8896
Web site: www.triontech.com