Dear colleagues:
I appreciate your comments on options available to us for photosensitive
passivation materials.
We have difficulty resolving 2um features on the Durimide 75xx series
polyimide  (or BCB) that is 4-6um thick.
I know some use PMGI or other photoresists when it comes to a resolution. I
wasn't sure although if photoresist passivation layer would behave well
under temperatures as high as 350'C, what achievable dark currents are
under high fields and how well they do under reliability/long term
stability tests. Let us know, please, if any of you have successful
experience with application of photoresists for passivation or any other
material for that matter.
Thank you very much.

Ivan Shubin,
Research Scientist,
ECE Department, University of California at San Diego
La Jolla, CA 92093
ph. 858-534-6570
fax 858-534-0556