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MEMSnet Home: MEMS-Talk: adhesion problems
Glass RIE
2003-04-08
Helen Li
2003-04-09
[email protected]
adhesion problems
2003-04-10
Rajib Ahmed
2003-04-11
Hongjun Zeng
2003-04-11
Sung Yang
adhesion problems
Sung Yang
2003-04-11
Hi Rajib
I think you can try Cr or Ti as an adhesion layer.
People usually use Cr(20~50nm) as an adhesion layer between glass and
gold.
I'm not sure whether it does work well or not for your silver system.
Also you can try Ti which is an excellent adhesion layer in Si
processing

-----Original Message-----
From: Rajib Ahmed [mailto:[email protected]]
Sent: Thursday, April 10, 2003 10:43 AM
To: General MEMS discussion
Subject: [mems-talk] adhesion problems

Hello everyone,

I am trying to coat some glass substrates with silver but the problem is
poor adhesion.  My coating thickness is approximately 200 nm.  Is there
any way I can pre-treat my glass surface with an adhesion promoter to
improve the quality so that silver can stick better?  Any suggestions
would be greatly appreciated.  Thanks a bunch,

************************************************************************
*******
Rajib Ahmed
347 Hopeman Engineering Building
Department of Electrical and Computer Engineering
University of Rochester
Rochester, NY 14627-0167
Email:[email protected]
Phone#:(585)275-8093
Fax#:(585)273-4919
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