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RE:Au and Cr dry etching (Martin.WALKER@oxinst.co.uk)
How to peel PDMS off from Si subtrate without tearing PDMS? (Pedro Parracho)
CR etchant price? (lbzhou)
stiction of contacting surfaces (Wenlin.Jin@jdsu.com)
UV-ozone versus O2 plasma (Bill Moffat)
UV-ozone versus O2 plasma (kirt_williams@agilent.com)
YSZ thermal barriers for mems (Haigh, Richard)
Released MUMPS chip (Glenn Guilford)
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