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  • Align and bond wafers without optical aligner ("유충호")
  • Gold bonding problem (Chiatti O)
  • 5" photomask ([email protected])
  • Using PMMA in HF-etching with HF / Slow Au etching (Sampo Tuukkanen)
  • Gold bonding problem (Bill Moffat)
  • Using PMMA in HF-etching with HF / Slow Au etchin g ([email protected])
  • 5" photomask (David Nemeth)
  • Using PMMA in HF-etching with HF / Slow Au etching (Mighty Platypus)
  • green gold (Madanagopal K.V.)
  • etching Si-N, but not Al2O3 (Honggang Jiang)
  • Ohmic contact to AlGaAs (Lihua Li)
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Process Variations in Microsystems Manufacturing