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  • Making holes in Pyrex glass wafers? (Carsten Wesselkamp)
  • MEMS Safe and arm ([email protected])
  • platinum on SU-8 (Chen-Han Lee)
  • sputtered silicon oxide (Torsten Kießling)
  • Used equipment for HF vapor dry etch of SiO2 (Andy McQuarrie)
  • Used equipment for HF vapor dry etch of SiO2 (Changping)
  • Used equipment for HF vapor dry etch of SiO2 (Changping)
  • PECVD of 8" wafer and 3" glass wafer (Honggang Jiang)
  • sputtered silicon oxide (PRAMOD GUPTA)
  • PZT Stacked wafer (Omar Zohni)
  • 13um thick resist ([email protected])
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