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  • SF6 isotropic etch (Marc Straub)
  • Strip Silicon Nitride (Y.C. Lin)
  • Problem with aluminium sputtering (Tomi Meilahti)
  • Problem with aluminium sputtering (adnan merhaba)
  • Problem with aluminium sputtering (Ravi Mullapudi)
  • CORRECTION: fabricating optics with reflowed photoresist in plasmaetcher, problem with surface roughness (Patrick Lu)
  • Problem with aluminium sputtering (Gary)
  • monolayer HF resist? (Michael Woodson)
  • monolayer HF resist? (Bill Moffat)
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