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  • RuO2 thin films deposition (wei chong)
  • Temporary Bonding for DRIE (Burkhard Volland)
  • TiO2 coating crystallisation (Nizard, Harry)
  • fabricating optics with reflowed photoresist in plasmaetcher, problem with surface roughness (Carsten Wesselkamp)
  • metals search (David Nemeth)
  • High Purity Si Wafers ([email protected])
  • Temporary Bonding for DRIE (BRAD JOHNSON)
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