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Bonding a plastic cover on a quartz chip with platinumheaters (Cheng Ming Lin)
Diches in diaphragm in KOH bulk micromachining (mahdi bagheri)
Re: Plasma activation for Wafer Bonding (BRIAN DOUGLAS)
Plasma activation for Wafer Bonding (Felix Lu)
etch silicon selectively over pmma/Ni (Abhinav Bhushan)
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