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  • 10 nm patterns (Parijat Bhatnagar)
  • SU8-developpement problems (Christoph Friese)
  • how to spincoat a 50nm thin uniform film of AZ9260? (Kirkness Jeoffrey)
  • MJB4 mask aligner lamp power and PMMA UV exposure (Kirkness Jeoffrey)
  • MJB4 mask aligner lamp power and PMMA UV exposure (Paul Maciel)
  • mems-talk] MJB4 mask aligner lamp power and PMMA UV exposure (Rob Hardman)
  • etch ZnO, not Al (Raegan Johnson)
  • etch ZnO, not Al (abong)
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