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  • HSQ Vs. NEB (Lee, Duhyun)
  • Anti-sticking treatment for hot embossing (Lee, Duhyun)
  • glass-glass bonding (Aegis Liang)
  • SU-8 refractive index (Jan Oberthür)
  • HSQ Vs. NEB (William Lanford-Crick)
  • Anisotropic deep silicon etch ([email protected])
  • RE: Anti-sticking treatment for hot embossing (Boris Kobrin)
  • PEPR2400 & EAGLE2100 (Lee Ganey)
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Process Variations in Microsystems Manufacturing