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  • direct patterning/fabrication on existing SiN membrane (Aaron Datesman)
  • rib waveguide using dry etch (Pramod Gupta)
  • direct patterning/fabrication on existing SiN membrane (Bill Moffat)
  • direct patterning/fabrication on existing SiN membrane (Andrea Mazzolari)
  • rib waveguide using dry etch (Bill Moffat)
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