resonator;SPM probe; IR detector; pressure sensor; accelerometer
Qualifications
[1] Han Jianqiang, Zhu Changchun,Liu Junhua et al, Dependence of the resonance frequency of thermally excited microcantilever resonators on temperature,Sensors and Actuators A,2002,101: 37-41.(SCI: 599QCïüÃÂEI:03097375506) [2] Han Jianqiang,Zhu Changchun,Liu Junhua1 et al,A novel temperature compensating structure for micromechanical bridge resonator, J. Micromech. Microeng. 15 (2005) : 702-705.(SCI: 920SCïüÃÂEI:05189078135) [3] Han Jianqiang,Li Xinxin,Wang Yuelin,et al,AFM probes fabricated with masked-maskless combined anisotropic etching and p+ surface doping,J. Micromech. Microeng. 16 (2006): 198-204. (SCI:017DJïüÃÂEI: 06059674764) [4] Han Jianqiang,Zhu Changchun,Liu Junhua et al,A micromechanical bridge shape voltage- controlled oscillator,Science in China Ser. E Technological Sciences 2004 Vol.47 No.1 26-32. (SCI:773XQ) [5] Han Jianqiang, Zhu Changchun, Liu Junhua et al,A novel voltage-controlled oscillator realized with a microresonator,Solid state electron 2005,49 (1):63-66. (SCI:879LXïüÃÂEI:04518718804) [6] Li Xinxin,Han Jianqiang,Bao Haifei,et al,Integrated SPM probes with NEMS technology,Sensors and Actuators A,2007,133:383-387.(EI:070510399316) [7] Han Jianqiang, Li Xinxin, Bao Haifei et al,High-yield fabrication of AFM probes with simultaneous formation of both nano-tips and cantilever,IEEE sensors,30 Oct.ïýÃÂ3 Nov. 2005,223-226. [8] Han Jianqiang,Lu Shaoyong,Li Qing,et al,Anisotropic Wet Etching Silicon Tips of Small Opening Angle in KOH Solution with the additions of I2/KI,Sensors and Actuators A 152 (2009) 75âÃÂÃÂ79. (SCIïüÃÂ452DHïüÃÂEIïüÃÂ20092012080323) [9] Jianqiang Han, Chuanlin Mao, Qing Zhong,New Thin-Film Multijunction Thermal Converter Based on P+ Polysilicon/Al thermocouples,Integrated Ferroelectrics, 2011,128: 8-13.ïüÃÂSCI:847YKïüÃÂEI:20121114 858013ïüà[10] Jianqiang Han, Xiaofei Wang, Tianhong Yan, et al, A Novel Method of Temperature Compensation for Piezoresistive Microcantilever-Based Sensors, Rev. Sci. Instrum,2012,83(3):035002~035002 -6ïüÃÂ(SCI:918CU) [11] Jianqiang Han, Meixuan Song, Xiaofei Wang, Qing Li,Wet Etching Silicon Nitride Films Deposited by PECVD in Doped TMAH Solutions,Advanced materials Research,2012, Vol: 465,1-7. ïüÃÂEI:20120914822209ïüà[12] Jianqiang Han, Meixuan Song, Xiaofei Wang, Qing Li, Effect of Thermal Power and Added Mass on the Resonance Frequency of bridge Resonators, Advanced materials Research,2012, Vol: 465, 14- 22.ïüÃÂEI:20120914822211ïüÃÂ
