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TermDefinition
rms Root mean square.
ROM Read only memory; memory used for permanent, storage of unalterable data; nonvolatile memory.
Sacrificial anode An active metal or alloy that corrodes and protects another metal or alloy to which it is electrically coupled.
Sacrificial layer A thin film that is later removed to release a microstructure from its substrate.
Scanning electron microscope (SEM) a microscope producing an image by using reflected electron beams that scan the surface of a specimen.
Selectivity The ability of a sensor to measure only one metric or, in the case of a chemical sensor, to measure only a single chemical species.
Semiconductor Nonmetallic material, such as silicon, whose electrical conductivity is moderate and alterable by doping.
Sensitivity The amount of change in a sensor's output in response to a change at a sensor's input over the sensor's entire range. Provides an indication of a sensor's ability to detect changes. For some sensors, the sensitivity is defined as the input parameter change required to produce a standardized output change.
SI units International System of units based on the metric system and units derived from the metric system.
Signal-to-noise-ratio The ratio of the output signal with an input signal to the output signal with no input signal.
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