A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here

Karl Bohringer, et al Micro Electro Mechanical Actuator Arrays
Our actuators are based on microfabricated torsional resonators [5], rectangular grids etched out of single-crystal silicon [6] and suspended by two rods that act as torsional springs. When an AC voltage is applied between grid and adjacent electrodes, the grid oscillates at resonance frequencies in the high kHz range. The edges of the grid reach deflections of several micrometers.
Terms of Use | Contact Us | Search