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Advanced Controls and Microsystems Laboratory, University of Minnesota
ACML is a research team at the University of Minnesota specializing in MEMS sensor design and fabrication. We are trying to develop new sensing principles by using control theory as an enabling technology. Our expertise lies in the area of applying advanced control algorithms on in-house fabricated MEMS devices. Some of the completed and ongoing projects include MEMS 2D electrostatic actuators that can be actuated inside the pull-in range by applying nonlinear controls, a MEMS absolute angle measurement sensor design, fabrication and implementation, wireless MEMS acoustic sensors and MEMS sensor SAW device integration for wireless sensors.
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