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Process Variations in Microsystems Manufacturing
Process Variations in Microsystems ManufacturingSpringer Nature Publishing Releases New Book on MEMS Manufacturing Authored by Dr. Michael Huff, Founder and Director of the MEMS and Nanotechnology Exchange (MNX) at Corporation for National Research Initiatives. The volume is entitled: Process Variations in Microsystems Manufacturing and covers how to estimate and manage the dimensional and material property variations resulting from the use of micro- and nano-fabrication techniques when designing and developing a microsystems device for production. This book is a valuable resource for practitioners, researchers and engineers working in the field as well as students at either the undergraduate or graduate level. Author info: https://www.springer.com/gp/book/9783030405588#aboutAuthors
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