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The Berkeley Sensor and Actuator CenterThe Berkeley Sensor and Actuator Center (BSAC) is a NSF/Industry/University cooperative research center funded by the Na...
The Carnegie Mellon University MEMS LaboratoryThe CMU MEMS Laboratory is developing miniature sensor and actuator systems made using batch-fabrication processes, espe...
The Microsystems Technology Laboratories (MTL) at MITThis page centralizes information about the FAB's and research going on at the MTL at MIT, including research on MEMS at...
The Stanford Center for Design Research (CDR)The Stanford CDR maintains information on a wide variety of research projects that include collaborative design, nationa...
Tufts University, Electro-Optics Tech Center
UCLA Micromanufacturing Laboratory
University of California Santa BarbaraHas two research groups, led by Prof. Noel MacDonald http://www.engr.ucsb.edu/~memsucsb/ and Kim Turner http://www.engr....
University of Illinois at Urbana-Champaign,MEMS at UIUC
University of Southern CaliforniaOne major current thrust is to develop various acoustic MEMS using piezoelectric films or substrates.
University of Stanford, Transducers Lab
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