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Material: Amorphous Carbon (a-C:H), film

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Property↑↓Value↑↓Conditions↑↓Reference↑↓
Elastic recovery during unloading0.25Thickness=0.5um,deposited on a tool steel substrate by magnetron sputtering method.Thin Solid Films,246(1994), p.108
Hardness,load-off9.05 GPaThickness=0.5um,deposited on a tool steel substrate by magnetron sputtering method.Thin Solid Films,246(1994), p.108
Hardness,load-on6.3 GPaThickness=0.5um,deposited on a tool steel substrate by magnetron sputtering method.Thin Solid Films,246(1994), p.108
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