Material: Lead Zirconate Titanate (PZT), film

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Property↑↓	Value↑↓	Conditions↑↓	Reference↑↓
Dielectric constant,relative	800 .. 1100	Used for piezoelectric actuation,film deposited by Sol-gel method,film thickness=0.5 um,54% zirconate & 46% titanate.	IEEE Micro Electro Mechanical Systems Workshop,Jan-Feb 1991,Nara,Japan, p.118
Electrical resistivity	200000 .. 1e+07 Ω*m	Used for piezoelectric actuation,film deposited by Sol-gel method,film thickness=0.5 um,54% zirconate & 46% titanate.	IEEE Micro Electro Mechanical Systems Workshop,Jan-Feb 1991,Nara,Japan, p.118
Piezoelectric coefficient	190 .. 250 pC/N	Used for piezoelectric actuation,film deposited by Sol-gel method,film thickness=0.5 um,54% zirconate & 46% titanate.	IEEE Micro Electro Mechanical Systems Workshop,Jan-Feb 1991,Nara,Japan, p.118
Stress,internal	0.8 .. 1e+08 Pa	Used for piezoelectric actuation,film deposited by Sol-gel method,film thickness=0.5 um,54% zirconate & 46% titanate.	IEEE Micro Electro Mechanical Systems Workshop,Jan-Feb 1991,Nara,Japan, p.118
Young's Modulus	10000 .. 40000 MPa	Used for piezoelectric actuation,film deposited by Sol-gel method,film thickness=0.5 um,54% zirconate & 46% titanate.	IEEE Micro Electro Mechanical Systems Workshop,Jan-Feb 1991,Nara,Japan, p.118