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Material: Silicon Nitride (SiN), film

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Property↑↓Value↑↓Conditions↑↓Reference↑↓
Young's Modulus230 .. 265 GPaObtained from laser induced ultrasonic surface wave method for a thickness of 0.2-0.3 um,choosing an intermediate density.Thin Solid Films 290-291(1996), p.309
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