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Material: Silicon Oxide (SiOx), film

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Property↑↓Value↑↓Conditions↑↓Reference↑↓
Stress-220 MPaPECVD ,temp=300 C,Nf=1.463,BHF etch rate=3125(A/min)Solid-State Sensors and Actuators Workshop,Hilton Head Island, South Carolina,June 1994, p.31
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