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MEMSnet Home: MEMS-Talk: Did anybody try to use MF319 for AZ1500 series developer?
Anyone ever done bonding for 3" quartz wafer?
2006-02-27
Chih-Chieh Cheng
Did anybody try to use MF319 for AZ1500 series developer?
2006-02-27
sokwon Paik
Did anybody try to use MF319 for AZ1500 series developer?
2006-02-28
Bin Liu
2006-02-28
Brubaker Chad
2006-03-08
Jesse D Fowler
Did anybody try to use MF319 for AZ1500 series developer?
sokwon Paik
2006-02-27
Hi!

  I want to use MF319 to develop AZ1518 layer ( I don't want to buy developer if
I can...I have AZ 1518 pre-coated wafers).

  According to the manual I can use most type of positive PR developer.. So, I
think I can use MF 319 for my wafer and some paper state that they used MF319
for some AZ1500 series.

  But the tehnical support person hestitate to say "yes" and instead of say yes
they said I can try to develope and then if OK then I can use......

  Please answer my question if you know anything about this....

  Thanks,

  sokwon

  p.s. Has anybody tried to develope SU-8 with acetone?
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