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MEMSnet Home: MEMS-Talk: Question on Silane depostion
Question on Silane depostion
2008-12-17
김태진
Question on Silane depostion
김태진
2008-12-17
Hello,

I'm trying to purchase a desiccator for Silane depostion on Si wafer.
Is an acrylic desiccator enough to fit my purpose?

Also, is it ok to use it as a vacuum chamber for degassing PDMS?

I couldn't decide if I should buy an expensive cabinet desiccator with a vacuum
connector, or a cost effective acrylic chamber for my PDMS fabrication and
Silane depostion.

Thank you!
reply
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