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MEMSnet Home: MEMS-Talk: Oxidation of doped silicon
Oxidation of doped silicon
2008-12-19
ameya g
2008-12-23
Seongmu Heo
Oxidation of doped silicon
ameya g
2008-12-19
Hi all

I was curious to know whether the thermal oxide (~100 nm) grown from doped
silicon has lower resistivity than the one grown from undoped silicon?

Can such an oxide cause any electrical leakage? Please let me know if anyone
has ever had any issues with this.

Thanks,
-Ameya
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