Suspended microchannel resonators (SMRs) offer excellent performance for real-time detection of various analytes and could hold the key to unlocking pico-calorimetry experiments. However, the typical readout techniques for SMRs are optical-based,
A monolithic lab-on-a-chip fabricated by femtosecond laser micromachining capable of label-free biosensing is reported. The device is entirely made of fused silica, and consists of a microdisk resonator integrated inside a microfluidic channel.
Predicting MEMS performance and the impact of process changes with the help of simulation. Micro-Electrical-Mechanical Systems (MEMS) based inertial sensors are used measure acceleration and rotation rate.
Taiwan-based Oriental System Technology (OST) is expected to scale up its shipments of infrared (IR) MEMS sensors for gaming notebooks to 4.5 million units in 2021 from 2.8 million in 2020.
