Material: Aluminum Nitride (AlN), film
To purchase MEMS-related materials, supplies, equipment, wafers, etc.,please visit the links section of the MEMSNet site.
| Property↑↓ | Value↑↓ | Conditions↑↓ | Reference↑↓ |
|---|---|---|---|
| Young's Modulus | 260 .. 350 GPa | Obtained from laser induced ultrasonic surface wave method for a thickness of 2.1-4 um,choosing an intermediate density. | Thin solid films 290-291(1996), p.309 |