Material: Aluminum Nitride (AlN), film

MEMS and Nanotechnology Clearinghouse

To purchase MEMS-related materials, supplies, equipment, wafers, etc.,please visit the links section of the MEMSNet site.

Property↑↓	Value↑↓	Conditions↑↓	Reference↑↓
Young's Modulus	260 .. 350 GPa	Obtained from laser induced ultrasonic surface wave method for a thickness of 2.1-4 um,choosing an intermediate density.	Thin solid films 290-291(1996), p.309