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| Property | Value | Conditions | Reference |
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| Elastic recovery during unloading | 0.25 | Thickness=0.5um,deposited on a tool steel substrate by magnetron sputtering method. | Thin Solid Films,246(1994), p.108 | | Hardness,load-off | 9.05 GPa | Thickness=0.5um,deposited on a tool steel substrate by magnetron sputtering method. | Thin Solid Films,246(1994), p.108 | | Hardness,load-on | 6.3 GPa | Thickness=0.5um,deposited on a tool steel substrate by magnetron sputtering method. | Thin Solid Films,246(1994), p.108 |
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