Material: Amorphous Carbon (a-C:H), film

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Property↑↓	Value↑↓	Conditions↑↓	Reference↑↓
Elastic recovery during unloading	0.25	Thickness=0.5um,deposited on a tool steel substrate by magnetron sputtering method.	Thin Solid Films,246(1994), p.108
Hardness,load-off	9.05 GPa	Thickness=0.5um,deposited on a tool steel substrate by magnetron sputtering method.	Thin Solid Films,246(1994), p.108
Hardness,load-on	6.3 GPa	Thickness=0.5um,deposited on a tool steel substrate by magnetron sputtering method.	Thin Solid Films,246(1994), p.108