Material: Amorphous hydrogenated silicon (a-Si:H), film
To purchase MEMS-related materials, supplies, equipment, wafers, etc.,please visit the links section of the MEMSNet site.
| Property↑↓ | Value↑↓ | Conditions↑↓ | Reference↑↓ |
|---|---|---|---|
| Poisson's Ratio | 0.25 | Value estimated by SAW technique ,using the ns Nd:YAG at 355 nm for launching and the probe beam deflection arrangement for detecting SAW pulses. | Applied Surface Science 106(1996), p.433 |