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To purchase MEMS-related materials, supplies, equipment, wafers, etc.,
please visit the links section of the MEMSNet site.
| Property | Value | Conditions | Reference |
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| Strain,limiting | 0.002 | Thin film,used in semiconductor fabrication. | IEEE,Micro Electro Mechanical Systems Workshop,Feb 1990, Napa Vally,California, p.174 | | Young's Modulus | 140 GPa | Thin film,used in semiconductor fabrication. | IEEE,Micro Electro Mechanical Systems Workshop,Feb 1990, Napa Vally,California, p.174 | | Young's Modulus | 185 .. 215 GPa | Hard chromium,value obtained from laser induced ultrasonic surface wave method for a thickness of 1-7 um choosing an intermediate density. | Thin solid films 290-291(1996), p.309 |
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