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please visit the links section of the MEMSNet site.
| Property | Value | Conditions | Reference |
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| Density | 1620 .. 1660 kg/m^3 | Thickness of 0.7-2.1 um,deposited on silicon<111>single crystal or quartz glass substrates,values obtained using short laser pulses to excite a surface acoustic wave(SAW) pulse,SAW wave number=0.18. | Applied Surface Science,86(1995), p.595 | | Poisson's Ratio | 0.25 .. 0.45 | Thickness of 0.7-2.1 um,deposited on silicon<111>single crystal or quartz glass substrates,values obtained using short laser pulses to excite a surface acoustic wave(SAW) pulse,SAW wave number=0.18. | Applied Surface Science,86(1995), p.595 | | Young's Modulus | 3 .. 5 GPa | Thickness of 0.7-2.1 um,deposited on silicon<111>single crystal or quartz glass substrates,values obtained using short laser pulses to excite a surface acoustic wave(SAW) pulse,SAW wave number=0.18. | Applied Surface Science,86(1995), p.595 |
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