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To purchase MEMS-related materials, supplies, equipment, wafers, etc.,
please visit the links section of the MEMSNet site.
| Property | Value | Conditions | Reference |
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| Density | 5320 kg/m^3 | Properties at temp=300 K,wavelength not given for refractive index | Semiconductor Sensors,by S.M.Sze,UMC chair professor,John Wiley & Sons ,INC.Appendix D, p.535 | | Dielectric constant | 13.1 | Properties at temp=300 K,wavelength not given for refractive index | Semiconductor Sensors,by S.M.Sze,UMC chair professor,John Wiley & Sons ,INC.Appendix D, p.535 | | Electrical resistivity,intrinsic | 1e+06 Ω*m | Properties at temp=300 K,wavelength not given for refractive index | Semiconductor Sensors,by S.M.Sze,UMC chair professor,John Wiley & Sons ,INC.Appendix D, p.535 | | Heat capacity | 47.02 J/mol/K | Properties at temp=300 K,wavelength not given for refractive index | Semiconductor Sensors,by S.M.Sze,UMC chair professor,John Wiley & Sons ,INC.Appendix D, p.535 | | Poisson's Ratio | 0.31 | Properties at temp=300 K,wavelength not given for refractive index | Semiconductor Sensors,by S.M.Sze,UMC chair professor,John Wiley & Sons ,INC.Appendix D, p.535 | | Refractive index | 3.66 | Properties at temp=300 K,wavelength not given for refractive index | Semiconductor Sensors,by S.M.Sze,UMC chair professor,John Wiley & Sons ,INC.Appendix D, p.535 | | Specific heat | 350 J/kg/K | Properties at temp=300 K,wavelength not given for refractive index | Semiconductor Sensors,by S.M.Sze,UMC chair professor,John Wiley & Sons ,INC.Appendix D, p.535 | | Thermal conductivity | 46 W/m/K | Properties at temp=300 K,wavelength not given for refractive index | Semiconductor Sensors,by S.M.Sze,UMC chair professor,John Wiley & Sons ,INC.Appendix D, p.535 | | Young's Modulus | 85.5 GPa | At temp=300 K. | Semiconductor Sensors by S.M.Sze ,UMC chair professor,John Wiley & sons,INC.Appendix D, p.535 |
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