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To purchase MEMS-related materials, supplies, equipment, wafers, etc.,
please visit the links section of the MEMSNet site.
| Property | Value | Conditions | Reference |
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| Density | 2250 kg/m^3 | Corning borosilicate glass,sputtered film,thickness=0.42um, values are calculated using electrostatically deflectable membranes and Cr for metallization(thickness of 0.005um),assuming density of 7200kg/m/m/m & Young's Modulus of 180 GPa for Cr films. | IEEE Transactions on electron devices,Vol.ED25,No.10,Oct1978, p.1249 | | Young's Modulus | 41.6 .. 62.4 GPa | Corning borosilicate glass,sputtered film,thickness=0.42um, values are calculated using electrostatically deflectable membranes and Cr for metallization(thickness of 0.005um),assuming density of 7200kg/m/m/m & Young's Modulus of 180 GPa for Cr films. | IEEE Transactions on electron devices,Vol.ED25,No.10,Oct1978, p.1249 |
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