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To purchase MEMS-related materials, supplies, equipment, wafers, etc.,
please visit the links section of the MEMSNet site.
| Property | Value | Conditions | Reference |
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| Dielectric constant,relative | 500 .. 3400 | 54% zirconate & 46% titanate. | IEEE Micro Electro Mechanical Systems Workshop,Jan-Feb 1991,Nara,Japan, p.118 | | Piezoelectric coefficient | 155 .. 590 pC/N | 54% zirconate & 46% titanate. | IEEE Micro Electro Mechanical Systems Workshop,Jan-Feb 1991,Nara,Japan, p.118 | | Young's Modulus | 4.8 .. 71000 GPa | 54% zirconate & 46% titanate. | IEEE Micro Electro Mechanical Systems Workshop,Jan-Feb 1991,Nara,Japan, p.118 |
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