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To purchase MEMS-related materials, supplies, equipment, wafers, etc.,
please visit the links section of the MEMSNet site.
| Property | Value | Conditions | Reference |
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| Density | 1200 kg/m^3 | Elastic plate,used in pin-type piezoelectric driving force actuators,model-D. | IEEE 5th International Symposium on Micro Machine and Human Science proceedings,Nagoya, Oct 1994, p.48 | | Young's Modulus | 2.1 GPa | Elastic plate,used in pin-type piezoelectric driving force actuators,model-D. | IEEE 5th International Symposium on Micro Machine and Human Science proceedings,Nagoya, Oct 1994, p.48 |
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MEMS and Nanotechnology Clearinghouse
