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please visit the links section of the MEMSNet site.
| Property | Value | Conditions | Reference |
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| Young's Modulus | 4 GPa | Value is for spring back angels 65-70 degrees ( after a 90 degree bend),baking at 140 C for 30 min then baking at 200 C for another 30 min,then at 350 C for 1 h (Postcure). | J.MEMS,March 1994,Vol.3,No.1, p.6 | | Young's Modulus | 3 GPa | Value is for spring back angels 20-25 degree(after a 90 degree bend),baking at 200Cfor 30 min(Precure). | J.MEMS,March 1994,Vol.3,No.1, p.6 |
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