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To purchase MEMS-related materials, supplies, equipment, wafers, etc.,
please visit the links section of the MEMSNet site.
| Property | Value | Conditions | Reference |
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| Elastic recovery during unloading | 0.63 | Bulk crystal | Thin Solid Films,246(1994), p.108 | | Hardness,load-off | 39.8 GPa | Bulk crystal | Thin Solid Films,246(1994), p.108 | | Hardness,load-on | 16 GPa | Bulk crystal | Thin Solid Films,246(1994), p.108 |
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MEMS and Nanotechnology Clearinghouse
