Material: Titanium Nitride (TiNx), film

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Property↑↓	Value↑↓	Conditions↑↓	Reference↑↓
Young's Modulus	120 .. 146 GPa	4um thickness,deposited by reactive sputtering of a titanium target onto stainless steel substrates in an Ar+N2 plasma,value obtained by bending test method is for low N2 pressure corresponding to nitrogen inserted into a titanium phase.	Thin Solid Films,270(1995), p.274
Young's Modulus	243 .. 295 GPa	An over stochiometrically dark brown TiNx coating, 4um thickness,deposited by reactive sputtering of a titanium target onto stainless steel substrates in an Ar+N2 plasma, value obtained by bending test method is for low N2 pressure corresponding to nitrogen inserted into a titanium phase.	Thin Solid Films,270(1995), p.274