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Material: Zirconium Oxide (ZrO2), film

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Property↑↓Value↑↓Conditions↑↓Reference↑↓
Coefficient of static friction0.08Used as a mover,min voltage to move the mover=850 V, bottom of the mover is glass plate,film condition:0.0416 um & deposited by Sol-gel method on silicon wafer.IEEE Micro Electro Mechanical Systems Workshop,Jan-Feb 1991, Nara,Japan, p.151
Coefficient of static friction0.16Used as a mover,min voltage to remove the mover=1025 V,bottom of the mover is Silicon substrate,film condition:0.0416 um & deposited by Sol-gel method on silicon wafer.IEEE Micro Electro Mechanical Systems Workshop,Jan-Feb 1991, Nara,Japan, p.151
Poisson's Ratio0.27Material property used in the finite element computations of ultra microhardness indentation of thin films,both coating and substrate are assumed to be homogenous and elastic/plastic.Thin solid films 290-291(1996), p.363
Static frictional force(max)0.000294 NUsed as a mover,min voltage to move the mover=850 V, bottom of the mover is glass plate,film condition:0.0416 um & deposited by Sol-gel method on silicon wafer.IEEE Micro Electro Mechanical Systems Workshop,Jan-Feb 1991, Nara,Japan, p.151
Static frictional force(max)0.000427 NUsed as a mover,min voltage to remove the mover=1025 V,bottom of the mover is Silicon substrate,film condition:0.0416 um & deposited by Sol-gel method on silicon wafer.IEEE Micro Electro Mechanical Systems Workshop,Jan-Feb 1991, Nara,Japan, p.151
Young's Modulus47.99 GPaCeramic,plasma sprayed,at room temperatureCRC Materials Science and Engineering Handbook, p.511
Young's Modulus12 .. 100 GPaPlasma sprayed,obtained from laser induced ultrasonic surface wave method for a thickness of 21-105 um, choosing an intermediate density.Thin Solid Films 290-291(1996), p.309
Young's Modulus160 GPaMaterial property used in the finite element computations of ultra microhardness indentation of thin films,both coating and substrate are assumed to be homogeneous and elastic/plastic.Thin solid films 290-291(1996), p.363
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