Try using a Focused Ion Beam (FIB).
Jon
Jon M. Hiller
Electron Microscopy Center
Argonne National Laboratory
9700 South Cass Avenue
Argonne, IL. 60439
Tel: 630-252-9558
Fax: 630-252-4289
-----Original Message-----
From: mems-talk-bounces@memsnet.org
[mailto:mems-talk-bounces@memsnet.org] On Behalf Of B Swope
Sent: Friday, May 02, 2003 09:53
To: mems-talk@memsnet.org
Subject: [mems-talk] Borosilicate Glass Holes
Hello,
I was wondering if anyone has any success with creating small ( <50
microns) holes in borosilicate glass. I am currently using an ablation
laser with mixed results...Any advice or suggestions would be greatly
appreciated.
Thanks,
Brett Swope
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