A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: Materail for Thermal laternal actuator
RE: Anisotropic Cu Wet etching
2003-05-06
HE,Han-Johnny
2003-05-07
Neal Ricks
2003-05-06
BobHendu@aol.com
2003-05-07
David Nemeth
2003-05-09
HE,Han-Johnny
Materail for Thermal laternal actuator
2003-05-09
HE,Han-Johnny
2003-05-09
Kirt & Erika Zipf-Williams
Materail for Thermal laternal actuator
HE,Han-Johnny
2003-05-09
Hi, all,

Just wondering why people prefer using poly-si instead of other mat.
such as metal for typical thermal lateral actuator?

Johnny

===========================================
Johnny H.HE,  Ph.D. Candidate
Division of Electrical Engineering, Engineering
Department,Cambridge University,CB2 1PZ, UK
or Downing College, Cambridge, CB2 1DQ ,UK
Email: jh353@cam.ac.uk
Tel:+44 1223 765199 Fax:+44 1223 332662
===========================================



reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
The Branford Group
MEMS Technology Review
Nano-Master, Inc.
Addison Engineering