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MEMSnet Home: MEMS-Talk: How to make polysilicon photodiode and phototransitor
How to make polysilicon photodiode and phototransitor
2003-05-14
Grace Yu
How to make polysilicon photodiode and phototransitor
Grace Yu
2003-05-14
Dear all,

I would like to have some advice on how to make polysilicon photodiode and
phototransitor. I am wondering if there are standard processes for fabricating
them and where to find those information.

Any help on process suggestions and information is highly appreceiated.

Many thanks,
Grace
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