Message: 2
Date: Tue, 13 May 2003 18:32:39 +0100
From: "A.K.Ismail" 
Subject: [mems-talk] Spin On Glass (SOG)  for planarization & anodic
        bonding
To: mems-talk 
Message-ID: <3EC58DE0@sws.ncl.ac.uk>
Content-Type: text/plain; charset="ISO-8859-1"

Dear All,

Does anybody know or have experience about this SOG that can be used for
planarizing surfaces (refill 1.5um depth trenches) and at the same time
compatible for anodic bonding (have sodium ions)?. Which company supply this

kind of materials? I found some companies which supply SOG for
microelectronic
industry but this type of SOG are not suitable for anodic bonding.

Best rgds,
A.K.Ismail

Dear Mr. Ismail,
There is a company/institute in Germany the use SOG for anodic bonding and
they working as foundry. You can contact Mr. Schulz. Email:
"schulz@isit.fhg.de" If you want further information don't hesitate to
contact me also.

Best Regards
Hell Erwin