Virginia Semiconductor advertises this material on their website;
www.virginiasemi.com




Almog Ronen  wrote:
Hi all,
I am going to fabricate Si3N4 membranes and I am looking for a reliable
wafers supplier.
Wafers specifications:
4" diameter, <100> Si with flat along <110>, Thickness : 525µm. Double side
polished.
100 nm thick LPCVD Si3N4 (Both sides). Low stress Si3N4 required.

Can someone recommend a reliable supplier with high quality wafers?

Thanks,
Ronen


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