I am working with an equipment supplier to determine the worthiness
of developing a critical point (CO2) dryer for the surface
micromachining community. The supplier currently makes CPDs with
small chambers, primarily for use in drying sensitive biological
samples.
Thus, I would like to take an informal survey to determine the
level of interest in a CPD capable of drying a full 4" or 6"
wafer that would cost in the neighborhood of $15K. Useful feedback
would include: application (R&D, prototyping, or production),
wafer size(s) of interest, desired throughput, desired level of
automation, etc.
Thanks in advance for your interest.
Jeff Melzak
Microfabrication Lab Manager
Case Western Reserve University