Hi, Liang
SU-8 should be hydrophobic. the easiest way is UV flood or O2 RIE to change
hydrophobic to hydrophilic. But the hydrophilic will gradually return to the
hydrophilic. It will last couple days.
good Luck!
Dlee li
Mechanical Engineering Dapartment
The Univerisisty of Texas At Austin
>From: mems-talk-request@memsnet.org
>Reply-To: mems-talk@memsnet.org
>To: mems-talk@memsnet.org
>Subject: MEMS-talk Digest, Vol 7, Issue 16
>Date: Wed, 14 May 2003 10:54:49 -0400
>
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>Today's Topics:
>
> 1. Re: PMMA protection during TMAH etching (Pavel Neuzil)
> 2. Spin On Glass (SOG) for planarization & anodic bonding
> (A.K.Ismail)
> 3. Can Nitride film be used as Pocl3 doping mask? (li zhiping)
> 4. information on langmuir probe:abhiram (Lakshmi Abhiram)
> 5. MEMS/NEMS suppliers database available on the website
> ofIntelligent MEMS Design, Inc. (Jin Lou)
> 6. Re: black dots on SiN (Andrew Tucker)
> 7. photoresist adhesion to Tungsten (Jim Beall)
> 8. black silicon (Isaac Wing Tak Chan)
> 9. Re: black dots on SiN (kin@astri.org)
> 10. SU8 surface hydrophobic (Andrew Liang)
> 11. Ansys for electrical pull-in effect (kevin)
> 12. Asymtek Millennium M-600 (katrin.fischer@bluemail.ch)
> 13. Si wafers for Si3N4 membranes (Almog Ronen)
> 14. Re: black silicon (Jim Beall)
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