That's probably Al/2%Si, which is aluminum with 2% silicon by weight.
The Si in the Al used for metallization prevents it from absorbing Si when
annealing is done to form a good electrical contact to Si.

----- Original Message -----
From: bobo 
To: 
Sent: Thursday, May 15, 2003 7:13 PM
Subject: [mems-talk] meaning of Al/2%/Si


> hi,everyone, who knows the meaning of "Al/2%/Si"? Thanks a lot.
>


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